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Glossary
Semester (Sem)
1First Semester
2Second Semester
AAnnual course
Educational activities
CSimilar or integrative activities
Language
Course completely offered in italian
Course completely offered in english
--Not available
Innovative teaching
The credits shown next to this symbol indicate the part of the course CFUs provided with Innovative teaching.
These CFUs include:
  • Subject taught jointly with companies or organizations
  • Blended Learning & Flipped Classroom
  • Massive Open Online Courses (MOOC)
  • Soft Skills
Course Details
Context
Academic Year 2018/2019
School School of Industrial and Information Engineering
Name (Master of Science degree)(ord. 270) - MI (474) Telecommunication Engineering
Track Z2A - SIGNALS
Programme Year 2

Course Details
ID Code 096038
Course Title PLASMAS FOR SURFACE MICRO AND NANOSTRUCTURING
Course Type Mono-Disciplinary Course
Credits (CFU / ECTS) 5.0
Semester Second Semester
Course Description Plasma definition and parameters; dynamics of charged particles in E and B fields; confinement. Plasma assisted physical vapour deposition. Plasma assisted chemical vapour deposition. Physics of sputtering: dc, rf, magnetron, unbalanced, closed field. Pulsed laser ablation - deposition. Deposition parameters versus thin film microstructure. Thermodynamic and kinetic models of film nucleation and growth.
Scientific-Disciplinary Sector (SSD)
Educational activities SSD Code SSD Description CFU
C
FIS/03
PHYSICS OF MATTER
5.0

Schedule, add and removeAlphabetical groupProfessorLanguageCourse details
From (included)To (excluded)
--AZZZZOssi Paolo Maria
manifesti v. 3.1.7 / 3.1.7
Area Servizi ICT
12/11/2019