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Glossary
Semester (Sem)
1First Semester
2Second Semester
AAnnual course
Educational activities
BIdentifying activities
Language
Course completely offered in italian
Course completely offered in english
--Not available
Innovative teaching
The credits shown next to this symbol indicate the part of the course CFUs provided with Innovative teaching.
These CFUs include:
  • Subject taught jointly with companies or organizations
  • Blended Learning & Flipped Classroom
  • Massive Open Online Courses (MOOC)
  • Soft Skills
Course Details
Context
Academic Year 2019/2020
School School of Industrial and Information Engineering
Name (Master of Science degree)(ord. 270) - MI (486) Engineering Physics
Track F2A - Photonics and Nano Optics
Programme Year 2

Course Details
ID Code 054352
Course Title IMAGING AND FABRICATION OF MICRO AND NANOSTRUCTURES (C.I.)
Course Type Integrated Course
Credits (CFU / ECTS) 10.0
Semester First Semester
Course Description The first part of the course presents a few of the main nanoscopic imaging techniques, focusing on the information that can be obtained (morphology, chemical contrast, short-and long-range structure, spectroscopy) and on the choice of the most effective nanoscopic techniques to tackle a technological or scientific investigation. The main topics are the theory and operation of scanning (SEM) and transmission (TEM) electron microscopy, and of scanning probe microscopy (SPM). The second part of the course presents the theory and technology of micro/nanofabrication, providing the student with the essential knowledge on the basic and advanced processing techniques for the realization of electronic, photonic and spintronic devices. The course covers the principal deposition methods (e.g. thermal evaporation, sputtering, laser ablation, chemical vapour deposition), for the growth of thin films and heterostructures, and the main micro- and nanopatterning technologies (e.g. optical and e-beam lithography, advanced lithographic techniques, and pattern transfer methods) for the definition of the devices.
Scientific-Disciplinary Sector (SSD)
Educational activities SSD Code SSD Description CFU
B
FIS/01
EXPERIMENTAL PHYSICS
10.0

Schedule, add and removeAlphabetical groupCodeModule DescriptionProfessorCFUSem.LanguageCourse details
From (included)To (excluded)
--AZZZZ054351MICRO AND NANOSTRUCTURE FABRICATIONCantoni Matteo5.01
054350ELECTRON AND SCANNING PROBE MICROSCOPYTagliaferri Alberto5.01
manifesti v. 3.3.3 / 3.3.3
Area Servizi ICT
30/03/2020