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Glossary
Semester (Sem)
1First Semester
2Second Semester
AAnnual course
Educational activities
BIdentifying activities
Language
Course completely offered in italian
Course completely offered in english
--Not available
Innovative teaching
The credits shown next to this symbol indicate the part of the course CFUs provided with Innovative teaching.
These CFUs include:
  • Subject taught jointly with companies or organizations
  • Blended Learning & Flipped Classroom
  • Massive Open Online Courses (MOOC)
  • Soft Skills
Course Details
Context
Academic Year 2019/2020
School School of Industrial and Information Engineering
Name (Master of Science degree)(ord. 270) - MI (491) Materials Engineering and Nanotechnology
Track U2F - Microengineering and microtechnology
Programme Year 1

Course Details
ID Code 089727
Course Title MICRO ELECTRO-MECHANICAL SYSTEMS (MEMS)
Course Type Mono-Disciplinary Course
Credits (CFU / ECTS) 5.0
Semester Second Semester
Course Description General presentation of Micro Electro Mechanical Systems: recent developments and future perspectives Micro-fabrication technology: process description, from lithography to the final device. Actuators: capacitive, electro-thermo-mechanical, piezoelectric. Microsystem description: accelerometers, gyroscopes, pressure sensors, micro-pumps. Modelling and simulation: multi-physics modeling, reduced order models and continuum models. Microsystem reliability: fracture, fatigue, stiction, pull-in instability, accidental drop.
Scientific-Disciplinary Sector (SSD)
Educational activities SSD Code SSD Description CFU
B
ICAR/08
STRUCTURAL MECHANICS
5.0

Schedule, add and removeAlphabetical groupProfessorLanguageCourse details
From (included)To (excluded)
--AZZZZCorigliano Alberto
manifesti v. 3.4.25 / 3.4.25
Area Servizi ICT
27/06/2022